少子寿命测试仪MDPlinescan详细介绍

MDPlinescan is designed as an easy to integrate OEM unit for integration into a variety of automated inspection lines. Key measurements are carrier lifetime scans on the fly. Samples are usually carried by a conveyor belt or robot system underneath the measurement head. Application examples range from brick to wafer inspection with measurement speed of less than one second per wafer. Incoming material quality investigation in cell production lines are frequent application cases as well as process quality check after passivation and diffusion, within many other specialised application possibilities. Easy to integrate only ethernet connection and power is needed. MDPlinescan w Includes additional resistivity measurement option. MDPlinescan被设计成一个易于集成的OEM单元，用于集成到各种自动化检测线中。关键的测量是实时运行载波寿命扫描。样品通常由测量头下面的传送带或机器人系统携带。应用实例范围从砖块到晶片的检测，每个晶圆的测量速度小于1秒。在细胞生产线进行的材料质量调查是经常使用的应用案例，以及钝化和扩散后的工艺质量检查，以及许多其他专业应用的可能性。只需要集成以太网连接和电源即可。 包括附加的电阻率测量选项。 Advantages Measurement of minority carrier lifetime and resistivity linescans at ?-PCD or steady state excitation conditions are in the focus of this small tool. OEM unit for the integration in production lines for multi- or monocrystalline silicon wafers at different preparation stages up to devices, bricks or ingots. Small size and standard automation interfaces allows for easy integration. Focus is put on long reliability and precision of measurement results. 优点 在μ-PCD或稳态激励条件下测量少数载流子寿命和电阻率线扫描是该小型工具的重点。 OEM单元用于多晶硅或单晶硅晶圆生产线的集成，在不同的准备阶段直至器件，砖块或铸锭。 小尺寸和标准自动化接口可以轻松集成。重点关注测量结果的长期可靠性和精度。